A STUDY COMPARING MEASUREMENTS OF ROUGHNESS OF SILICON AND SIO2 SURFACES AND INTERFACES USING SCANNING PROBE MICROSCOPY AND NEUTRON REFLECTIVITY

A CROSSLEY, C J SOFIELD, J P GOFF, A C I LAKE, M T HUTCHINGS, A MENELLE

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)221-226
Number of pages6
JournalJournal of non-Crystalline solids
Volume187
Publication statusPublished - Jul 1995

Keywords

  • TUNNELING MICROSCOPY
  • OXIDE SURFACES
  • SI(111)
  • HF

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