Anodically bonded submicron microfluidic chambers

S. Dimov, R. G. Bennett, A. Córcoles, L. V. Levitin, B. Ilic, S. S. Verbridge, J. Saunders, A. Casey, J. M. Parpia

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number013907
Number of pages7
JournalReview of Scientific Instruments
Volume81
Issue number1
DOIs
Publication statusPublished - 29 Jan 2010

Keywords

  • anodisation
  • electrodes
  • microfluidics
  • silicon
  • silicon compounds
  • SUPERFLUID HE-3
  • SURFACES
  • SILICON

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